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KINETIC-STUDY OF ATOMIC-HYDROGEN ETCHING OF GAAS(100)

TitleKINETIC-STUDY OF ATOMIC-HYDROGEN ETCHING OF GAAS(100)
Publication TypeJournal Article
Year of Publication1995
AuthorsElzey, JW, Meharg, PFA, Ogryzlo, EA
JournalJournal of Applied Physics
Volume77
Pagination2155-2159
Date PublishedMar
Type of ArticleArticle
ISBN Number0021-8979
KeywordsGaAs, GALLIUM-ARSENIDE, H-2, OXIDES, PLASMAS, RATE CONSTANTS, RESONANCE, SI, SILICON, SURFACES
URL<Go to ISI>://A1995RC30300054