Performance Features
- Dual anode (Mg and Al K alpha) achromatic X-ray source
- Monochromatic (Al K alpha) X-ray source
- Apertures for variable area analysis (200 um diameter spot to 4x7 mm2)
- 18 channel detection
- Differentially-pumped Ar+ gun for XPS depth profiling and sample cleaning
- Electron flood gun for charge neutralization of insulating samples
- Motorized 5-axis manipulator for angle dependent XPS measurement
- Ion Scattering and Auger Electron Spectroscopy (ISS & AES)
- In-situ sample heating
- Catalytic reactor chamber
Typical Analytical Applications
- Qualitative analysis (all elements except H, He)
- Quantitative analysis (± 5%)
- Chemical state information (e.g. identification oxidation state)
- Angle dependent XPS measurement for non-destructive depth profiling
- XPS depth profiling analysis by ion sputtering
- Thin film thickness measurement (<10 nm)