Title | Resistivity-microstructure correlation of self-annealed electrodeposited copper thin films |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Alshwawreh, N, Militzer, M, Bizzotto, D, Kuo, JC |
Journal | Microelectronic Engineering |
Volume | 95 |
Pagination | 26–33 |
Date Published | jul |
![](https://chem.ubc.ca/sites/default/files/styles/header_large_c/public/header_images/ugradlab-header.jpg?itok=-FidXx5L×tamp=1585256910)