Thermo VG Microlab 350 Scanning Auger Microscope (SAM)

Thermo VG Microlab 350 Scanning Auger Microscope (SAM)


Performance Features

  • Field emission electron source with high beam current density and high spatial resolution (7 nm for SEM and 12 nm for SAM)
  • 150 mm radius hemispherical energy analyzer with high energy resolution (0.02%)
  • Scanning Electron Microscopy (SEM)
  • Auger Electron Spectroscopy (AES)
  • Scanning Auger Microscope (SAM)
  • Differentially-pumped Ar+¬†gun for depth profiling and sample cleaning
  • Motorized 5-axis manipulator for angle dependent AES measurement and depth profiling under sample rotation
  • Energy Dispersive X-ray Microanalysis (EDX)
  • Reflected Electron Energy Loss Spectroscopy (REELS)
  • In-situ¬†sample heating/fracturing
  • Backscattered Electron Detector (BSD)

Typical Analytical Applications

  • Surface analysis (SEM/AES/SAM) of small areas (spatial resolution < 100 nm)
  • Auger line scan analysis
  • Elemental mapping
  • Elemental depth profiling
  • Non-destructive depth profiling by Angle Dependent Auger Electron Spectroscopy (ADAES)
  • Simultaneous surface analysis (with AES) and bulk analysis (with EDX)
  • REELS analysis for distinguishing different forms of a material (e.g. graphite, diamond & amorphous carbon; n- & p-type Si)