| Title | XPS INVESTIGATIONS OF THE INTERACTIONS OF HYDROGEN WITH THIN-FILMS OF ZIRCONIUM-OXIDE .2. EFFECTS OF HEATING A 26-ANGSTROM THICK-FILM AFTER TREATMENT WITH A HYDROGEN PLASMA |
| Publication Type | Journal Article |
| Year of Publication | 1995 |
| Authors | Li, YS, Wong, PC, Mitchell, KAR |
| Journal | Applied Surface Science |
| Volume | 89 |
| Pagination | 263-269 |
| Date Published | Jul |
| Type of Article | Article |
| ISBN Number | 0169-4332 |
| Keywords | AES, EELS, SPECTRA, ZRO2 |
| Abstract | In order to help establish the role hydrogen plays in the oxidation and reduction of zirconium oxide thin films, XPS was used to study the effects of heating a 26 Angstrom thick ZrO2 film after a hydrogen-plasma treatment. The latter treatment produced a uniform hydrogen-trapped ZrO2 film. Heating to 425 degrees C yielded a reduced suboxide, ZrOx, particularly in the deeper regions of the film, but near the surface this heating produced a zirconium state with Zr3d(5/2) binding energy at 183.4 eV, which is higher than that of ZrO2 by about 0.5 eV. This new chemical state of zirconium appears especially related to Zr-OH bonding. This result, with the observed inhomogeneity of the film, strongly suggests that either H2O or OH- species migrate to the surface region of the hydrogen-trapped ZrO2 film during the heating process. |
| URL | <Go to ISI>://A1995RG14700006 |
