| Title | KINETIC-STUDY OF ATOMIC-HYDROGEN ETCHING OF GAAS(100) |
| Publication Type | Journal Article |
| Year of Publication | 1995 |
| Authors | Elzey, JW, Meharg, PFA, Ogryzlo, EA |
| Journal | Journal of Applied Physics |
| Volume | 77 |
| Pagination | 2155-2159 |
| Date Published | Mar |
| Type of Article | Article |
| ISBN Number | 0021-8979 |
| Keywords | GaAs, GALLIUM-ARSENIDE, H-2, OXIDES, PLASMAS, RATE CONSTANTS, RESONANCE, SI, SILICON, SURFACES |
| URL | <Go to ISI>://A1995RC30300054 |
